| BESOI光波导的研制 |
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| 引用本文： | 李国正 赵策洲. BESOI光波导的研制[J]. 光子学报, 1996, 25(3): 252-255 |
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| 作者姓名： | 李国正 赵策洲 |
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| 作者单位： | 西安交通大学电子工程系 西安 710049 |
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| 摘 要： | 本文通过大量实验,采用键合及背腐蚀方法研制成功 SOI 光波导,传输损耗仅0.85dB/cm.
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| 关 键 词： | 集成光学 SOI 光波导 |
| 收稿时间： | 1994-12-02 |
STUDY AND MANUFACTURE OF OPTICAL WAVEGUIDES IN BESOI STRUCTURES |
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| Li Guozheng,Zhao Cezhou,Zheng Yuxiang,Liu Enke. STUDY AND MANUFACTURE OF OPTICAL WAVEGUIDES IN BESOI STRUCTURES[J]. Acta Photonica Sinica, 1996, 25(3): 252-255 |
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| Authors: | Li Guozheng Zhao Cezhou Zheng Yuxiang Liu Enke |
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| Affiliation: | Department of Electronic Engineering, Xi’an Jiaotong Universitys, Xi’an 710049 |
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| Abstract: | Through a lot of experiments,using methods of bonding and etching back,the optical waveguides in SOI structures have been fabricated with propagation loss of 0.85dB/cm. |
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| Keywords: | Integrated Optics SOI Ootical waveguide |
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