Reflection of keV-energy electrons from multilayer surfaces

The energy spectra of electrons reflected from multilayer targets are studied theoretically and experimentally. A self-consistent theory of electron reflection from multilayer surfaces is constructed. Simple analytical models of electron reflection that illustrate the feasibility of the depth profiling of multilayer targets are presented. The energy spectra of electrons normally incident on Nb/Si and Nb/Al/Nb/Si targets and reflected from them at an angle of 45° to the normal are taken. A method for the depth profiling of such structures is elaborated.