New polyfluoro(silyl)acetylenes were prepared by reaction of the creesponding fluoro(silyl)acetylenes with triethylamine in excellent to moderate isolated yields. In contrast, the corresponding nonfluorinated silylacetylene was unable to give poly(silyl)acetylene under similar conditions. These polyfluoro(silyl)acetylenes thus obtained can form the nanometer size-controlled cubic fine particles (within 100 nm) in a variety of solvents.