Hybrid laser—magnetron technology for carbon composite coating |
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| Authors: | M Jelínek T Kocourek Ja Kadlec J Zemek |
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| Institution: | (1) Institute of Physics, Na Slovance 2 o182 21, Prague 8, Czech Republic;(2) Faculty of Biomedical Engineering, Czech Technical University, nám. Sítná 3105, Kladno, 27201, Czech Republic;(3) Military Academy, Brno, Czech Republic |
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| Abstract: | Hybrid laser- magnetron deposition system was developed and tested for study of carbon based thin film coatings. Various geometrical configurations and deposition conditions were tested. Films of TiC, TiCN, and SiC were synthesized. Films were fabricated in argon (TiC), in argon/nitrogen (TiCN), or in argon/hydrogen ambient (SiC films). Film properties were studied by SEM, XRD, GDOES, and XPS. Smooth, homogeneous film over the area of 9 cm2 were prepared. Crystalline TiC films were grown at room substrate temperature. |
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