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Combined frequency- and time-domain photocarrier radiometry characterization of ion-implanted and thermally annealed silicon wafers |
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| Authors: | Ren Sheng-Dong Li Bin-Cheng Gao Li-Feng and Wang Qian |
| Affiliation: | [1]Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China [2]University of the Chinese Academy of Sciences, Beijing 100049, China |
| Abstract: | |
| Keywords: | photocarrier radiometry ion implantation effective lifetime silicon |
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