表面波等离子体源的发展现状

对微波放电产生的平板型表面波等离子体源进行了系统介绍,分析了表面波等离子体的工作原理, 探讨了维持表面波等离子体放电的能量吸收机制,介绍了由单模谐振腔阵列、 亚波长衍射光栅及开槽天线阵列组成的新型波模转换器.表面波等离子体的产生机理、实现途径、 参数特性和数值仿真等方面的研究进展及其所取得的成果,有利于促进新型表面波等离子体源走向产业化应用, 并促使微电子产业的功效取得新的突破.

The current status of surface wave plasma source development

In this paper, a flat-type surface wave plasma (SWP) source generated by microwave discharg is introduced systematically. The principle of the surface wave plasma is analyzed and the energy absorption mechanism of the surface wave plasma discharge is explored. A novel wave-mode converter composed of the single-mode resonator array, sub-wavelength diffraction grating and a new type of slot antenna array is introduced. The research findings, such as the mechanism of the generation, the realization, the characteristics of plasma parameters and the numerical simulation of the new SWP sources are beneficial to industrial applications, will promote the effectiveness of the microelectronics industry and obtain a new breakthrough.