真空磁场热处理温度对不同厚度的Ni88Cu12薄膜畴结构及磁性的影响

利用射频磁控共溅射方法,在Si衬底上制备了Ni88Cu12薄膜,并且研究了膜厚以及真空磁场热处理温度对畴结构和磁性的影响. X射线衍射结果表明热处理后的薄膜晶粒长大,扫描电子显微镜结果发现不同热处理温度下薄膜表现出不同的形貌特征.热处理前后的薄膜面内归一化磁滞回线结果显示,经过热处理的Ni88Cu12薄膜条纹畴形成的临界厚度降低,未热处理的Ni88Cu12薄膜在膜厚为210 nm时出现条纹畴结构,而经过300℃热处理的Ni88Cu12薄膜在膜厚为105 nm就出现了条纹畴结构.高频磁谱的结果表明,随着热处理温度的增加, Ni88Cu12薄膜的共振峰会有小范围的移动.

Influence of magentic annealing temperature on microstructure and magnetic properties of NiCu alloy film

In this paper, Ni88Cu12 thin films are prepared on Si substrates by radio-frequency magnetron co-sputtering.The effects of film thickness and heat treatment on domain structure and magnetic properties are studied. The Ni88Cu12 films with thickness less than 210 nm show weak in-plane anisotropy. After the vacuum magnetic field heat treatment, the crystal grains of all films grow, and the in-plane anisotropy extents of Ni88Cu12 films with thickness less than 210 nm become weaker. The films have different morphological characteristics at different heat treatment temperatures. The surface of the film is very dense before heat treatment. After heat treatment at 300 ℃, it forms island shape due to the solid solution between the grains. Compared with the grains on the surface of the heat-treated film at 300 ℃, the grains grow further after being heat-treated at 400 ℃. Grown grains cover the gaps between the grains, which makes the film surface flat. The results of in-plane normalized hysteresis loop of the films show that the critical thickness of the stripe domains decreases after heat treatment.The stripe domain structure appears in the 210-nm-thick films without being heat-treated. For the film with the heat treatment, its remanence ratio Mr/Ms decreases, and the saturation field Hs increases, and thus leading the perpendicular anisotropy constant Kp to increase. Therefore, the thickness of the stripe domain in the film after being heat-treated decreases. Compared with the films after being heat-treated, the 105-nm-thick as-prepared Ni88Cu12 film has a maximum natural resonance frequency of 2.1 GHz, which is attributed to the uniaxial anisotropy of the as-prepared Ni88Cu12 film. The saturation magnetization of the 300 ℃-treated 105-nm-thick film decreases to 3.01 × 10^5 A/m. However, the saturation magnetization decreases to 5.9 × 10^5 A/m after heat treatment at 400 ℃. Moreover, the ferromagnetic resonance peak of the film narrows after being treated at 300 ℃,and the resonance frequency decreases to 1.95 GHz.