Doping Properties of Pr2O3 Associate InP Liquid Phase Epitaxy

InP epilayers were grown on semi-insulating InP substrates by liquid phase epitaxy with Pr₂O₃-doping. Most grown layers yield mirror-like surfaces and good crystal quality. Hall measurements indicate that n-type background concentration of those grown InP layers will decrease from a value of 2.8 × 10¹⁷ to 3.0 × 10¹⁶ cm⁻³. Their correspondent 77 K mobility also varied from a value of 1326 to 3775 cm²/V s. The photoluminescence (PL) spectra of Pr₂O₃-doped InP epilayers display narrower FWHM and stronger intensity ratios (for band peak to the impurity peak). These PL spectra also demonstrate that the grown layers exhibit a pure crystal quality.