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| 二维光子晶体的软平板印刷技术制作研究 | |
| 引用本文： | 张飒飒,王青圃,张行愚,连洁,常军,李岚,陈佳琦,王丽,陈瑞曾.二维光子晶体的软平板印刷技术制作研究[J].光子学报,2009,38(1):54-59. |
| 作者姓名： | 张飒飒 王青圃 张行愚 连洁 常军 李岚 陈佳琦 王丽 陈瑞曾 |
| 作者单位： | 1. 山东大学,信息科学与工程学院,济南,250100;德克萨斯大学,奥斯汀分校,微电子研究中心,德克萨斯,奥斯汀,78758 2. 山东大学,信息科学与工程学院,济南,250100 3. 天津理工大学,材料物理研究所,天津,300191 4. 德克萨斯大学,奥斯汀分校,微电子研究中心,德克萨斯,奥斯汀,78758 |
| 基金项目： | 国家自然科学基金，教育部高等学校博士学科点专项科研基金，国家留学基金 |
| 摘 要： | 分析了软平板印刷技术制作二维光子晶体的特点和方法.利用绝缘PDMS模板，采用软平板印刷技术制造了三角晶系结构的二维聚合物光子晶体，采用同样的技术成功制成尺寸为150~500 nm，纵横比达1.25的高密度二维光子晶体.与其他制作技术相比，平板印刷技术具有大尺寸和易于制作的优点.结果表明，制作获得的微结构有很高的保真度. |
| 关 键 词： | 光子晶体 软平板印刷术 聚合物 |
| 收稿时间： | 2007-07-20 |
| 修稿时间： | 2007-10-22 |
Fabricating 2-D Polymer Photonic Crystals by Soft Lithography Technology |
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| ZHANG Sa-sa,WANG Qing-pu,ZHANG Xing-yu,LIAN Jie,CHANG Jun,LI Lan,CHEN Jia-qi,WANG Li,CHEN Rui-ceng.Fabricating 2-D Polymer Photonic Crystals by Soft Lithography Technology[J].Acta Photonica Sinica,2009,38(1):54-59. | |
| Authors: | ZHANG Sa-sa WANG Qing-pu ZHANG Xing-yu LIAN Jie CHANG Jun LI Lan CHEN Jia-qi WANG Li CHEN Rui-ceng |
| Institution: | 1 School of Information Science & Engineering;Shandong University;Jinan;Shandong 250100;China;2 Institute of Material Physics;Tianjin University of Technology;Tianjin 300191;China;3 Department of Electrical & Computer Engineering;The University of Texas at Austin;Austin;Texas 78758;USA |
| Abstract: | The characteristic and method of fabricating two-dimensional (2-D) polymer photonic crystals by soft lithography technology were analyzed.Using elastomeric polydimethysiloxane (PDMS) templates,two-dimensional polymer photonic crystals with triangular lattice structure were fabricated by soft lithography.And the high density two dimensional photonic crystal with feature sizes of 150~500 nm and aspect ratios of up to 1.25 were successfully replicated by the same method.Compared with other imprint technology,large field size and easy fabrication are two major advantages of soft lithography.Atomic Force Microscopy images show that the molded structures had high fidelity to the masters. |
| Keywords: | Photonic crystal Soft lithography Polymer |
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