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Effects of composition and catalyst on the optical properties of ZrO2-based Ormosil films
Authors:A. Baraldi  R. Capelletti  C. Mora  M. Pavesi  P. Prosposito
Affiliation:a Istituto Nazionale per la Fisica della Materia (INFM) and Dipartimento di Fisica, Universitá di Parma, Parco Area delle Scienze 7A, 43100 Parma, Italy
b Istituto Nazionale per la Fisica della Materia (INFM) and Dipartimento di Fisica, Universitá di Roma ‘Tor Vergata’, Via della Ricerca Scientifica 1, 00133 Rome, Italy
c Istituto Nazionale per la Fisica della Materia (INFM) and Dipartimento di Ingegneria Meccanica, Universitá di Roma ‘Tor Vergata’, Via di Tor Vergata, 00133 Rome, Italy
d IMEM-CNR, Parco Area delle Scienze 37A, 43010 Fontanini, Parma, Italy
Abstract:
FTIR spectroscopy measurements were performed to investigate zirconia-based Ormosil thin films. Samples synthesized with a sol-gel technique were prepared starting from 3-glycidoxypropil-trimethoxysilane (GLYMO) and zirconium(IV)-propoxide (Zr-OPr). Acetic or nitric acid were used as a catalyst. The effects induced by the Zr content and the catalyst type on the mid-infrared spectra of the sol-gel hybrid films were studied and a detailed assignment of the vibrational absorption bands is presented. The thermal evolution of the hybrid systems was also followed by monitoring the release of the organic groups, the thickness, and refractive index changes by means of FTIR, diffuse reflectance spectroscopy, and ellipsometry.
Keywords:O130   O155   O110
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