Combined surface-focused acoustic microscopy in transmission and scanning ultrasonic holography |
| |
Authors: | Twerdowski Evgeny von Buttlar Moritz Razek Nasser Wannemacher Reinhold Schindler Axel Grill Wolfgang |
| |
Institution: | University of Leipzig, Institute of Experimental Physics II, D-04103 Leipzig, Germany. twerdowski@physik.uni-leipzig.de |
| |
Abstract: | Employment of ultrasound techniques in nondestructive testing may require identification of the acoustic modes contributing to imaging. Such identification can be achieved, with some restrictions, by time-of-flight analysis. Another approach is acoustic holography that reveals the propagation properties of any selected mode. In anisotropic media, the propagation features are distinct and allow for a reliable classification of the selected mode. Both techniques were applied for classification of bonded, disbonded, and weakly bonded areas in directly bonded semiconductor wafers. |
| |
Keywords: | |
本文献已被 PubMed 等数据库收录! |
|