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| 预试环中H_2及掺杂甲烷的辉光放电清洗 | |
| 引用本文： | 曾建尔. 预试环中H_2及掺杂甲烷的辉光放电清洗[J]. 核聚变与等离子体物理, 1986, 0(2) |
| 作者姓名： | 曾建尔 |
| 作者单位： | 西南物理研究所 四川，乐山 |
| 摘 要： | 本文给出了在预试环中产生和维持辉光放电的基本参数、氢气(H_2)及氢气掺杂甲烷(H_2/CH_4)辉光放电清洗过程中的质谱分析结果以及氢气辉光放电清洗处理后的样品表面SIMS(二次离子质谱)结果,并进行了讨论。 |
| 关 键 词： | 辉光放电清洗 质谱分析 SIMS分析 |
H2 AND H_2/CH_4 GLOW DISCHARGE CLEANING IN PRE-TEST TORUS |
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| ZENG Jianer. H2 AND H_2/CH_4 GLOW DISCHARGE CLEANING IN PRE-TEST TORUS[J]. Nuclear Fusion and Plasma Physics, 1986, 0(2) | |
| Authors: | ZENG Jianer |
| Abstract: | The experiment of glow discharge in the pre-test torus is described.The conditions needed to initiate and sustain the glow discharge are presented.Also presented are the mass-spectrum during H2 and H2/CH4 glow discharges and the surface SIMS-spectrum of samples treated by H2 glow discharge The results are discussed. |
| Keywords: | glow discharge cleaning mass-spectral analysis SIMS-analysis. |
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