Der Einfluß der Reaktorgeometrie auf die Si3N4-Abscheidung

To explain the different efficience and kinetics as they were found in reactors with various geometry the model of thermal diffusion was attracted. The factor of separating, derived from the diffusion equation containing a term of thermal diffusion permits statements on comparability and transferability of reactors. Further it is possible to discuss the influence of temperature on deposition rate different in the various reactors. It is suggested that the wide spectrum of deposition conditions reviewed in literature for similar physical film properties is based on the different reactor geometry used by investigators.