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Sensor properties of structures with porous silicon layer
Authors:Z. H. Mkhitaryan  V. M. Aroutiounian  Sh. A. Geghamyan
Affiliation:1. Yerevan State University, Yerevan, Armenia
Abstract:We have measured at room temperature current-voltage and noise characteristics of structures with a porous silicon (porosity 80%) layer at adsorption of gases ammonia, propane and butane mixture, and ethyl alcohol vapor. It was obtained that the largest change in CVC and low-frequency noise is observed under action of ammonia gas on the structure. Physical reasons of sensor properties of studied samples are discussed.
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