Sensor properties of structures with porous silicon layer |
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Authors: | Z. H. Mkhitaryan V. M. Aroutiounian Sh. A. Geghamyan |
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Affiliation: | 1. Yerevan State University, Yerevan, Armenia
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Abstract: | We have measured at room temperature current-voltage and noise characteristics of structures with a porous silicon (porosity 80%) layer at adsorption of gases ammonia, propane and butane mixture, and ethyl alcohol vapor. It was obtained that the largest change in CVC and low-frequency noise is observed under action of ammonia gas on the structure. Physical reasons of sensor properties of studied samples are discussed. |
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