| 金属有机分解法制备钛酸铜钙薄膜 |
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| 引用本文： | 杨玉国,王卓,杨长红.金属有机分解法制备钛酸铜钙薄膜[J].人工晶体学报,2006,35(1):152-154,138. |
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| 作者姓名： | 杨玉国 王卓 杨长红 |
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| 作者单位： | 山东大学晶体材料国家重点实验室,济南,250100 |
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| 摘 要： | 采用金属有机分解法(MOD)在p-S i(111)衬底上制备了钛酸铜钙(CaCu3Ti4O12)薄膜。对前驱体溶液粉体退火后做了红外和X射线分析;对薄膜退火后做了X射线和原子力显微镜分析。结果表明,在空气中750℃退火1h后,钛酸铜钙结晶良好;钛酸铜钙薄膜的生长为二维生长模式。
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| 关 键 词： | 金属有机分解法 钛酸铜钙 薄膜 |
| 文章编号： | 1000-985X（2006）01-0152-03 |
| 收稿时间： | 2005-05-14 |
| 修稿时间： | 2005-05-14 |
Preparation of CaCu3Ti4O12 Thin Films Grown by Metalorganic Solution Deposition |
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| YANG Yu-guo,WANG Zhuo,YANG Chang-hong.Preparation of CaCu3Ti4O12 Thin Films Grown by Metalorganic Solution Deposition[J].Journal of Synthetic Crystals,2006,35(1):152-154,138. |
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| Authors: | YANG Yu-guo WANG Zhuo YANG Chang-hong |
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| Institution: | state Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China |
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| Abstract: | The CaCu_3Ti_4O_(12) thin films were prepared by a metalorganic solution deposition method and deposited on p-Si(111) substrates by spin coating.Powder of the precursor solutions was studied by infrared scattering spectroscopy and X-ray diffraction,and thin films were studied by X-ray diffraction in the same way.Surface morphology and dimensional measurements after annealing the films were observed and discussed by using atomic force microscopy. |
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| Keywords: | metalorganic solution deposition CaCu_3Ti_4O_(12) thin films |
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