| Novel optical lithography using silver superlens |
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| 作者姓名： | 秦海燕 李璇 申溯 |
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| 作者单位： | Centre for Optical and Electromagnetic Research Zhejiang University，Joint Research Center of Photonics of the Royal Institute of Technology and Zhejiang University(JORCEP)，Centre for Optical and Electromagnetic Research Zhejiang University，Joint Research Center of Photonics of the Royal Institute of Technology and Zhejiang University(JORCEP)，The Institute of Information Optical Engineering Soochow University Hangzhou 310058，Hangzhou 310058，Suzhou 215006 |
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| 基金项目： | the National Basic Research Program under Grant No.2004CB719801 |
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| 摘 要： | This work has demonstrated that with silver superlens,the resolution of conventional optical lithography can be improved significantly.Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.
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