Stresses in Silicon after Boron Diffusion (I). Determination of Residual Stresses in Boron-diffused Silicon Slices Using Lang's Method

The radii of curvature of specially prepared specimens are determined by means of the Lang method, from which qualitative and quantitative information can be obtained on stresses in boron-diffused silicon slices. It is possible to give an estimation of the serveral causes of the stresses.