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Deposition mechanism of nano-structured single-layered C36 film on a diamond (100) crystal plane
引用本文:陈明君,梁迎春,袁屹杰,李 旦. Deposition mechanism of nano-structured single-layered C36 film on a diamond (100) crystal plane[J]. 中国物理 B, 2008, 17(11): 4260-4267
作者姓名:陈明君  梁迎春  袁屹杰  李 旦
作者单位:Center for Precision Engineering, Harbin Institute ofTechnology,Harbin 150001, China;Center for Precision Engineering, Harbin Institute ofTechnology,Harbin 150001, China;Center for Precision Engineering, Harbin Institute ofTechnology,Harbin 150001, China;Center for Precision Engineering, Harbin Institute ofTechnology,Harbin 150001, China
基金项目:Project supported byNew Century Elitist Supporting Program Foundation by the Ministry ofEducation of Chinapar (Contract No NCET-06-0332) and the NationalNatural Science Foundation of China(Grant No 50405011).
摘    要:The Brenner-LJ potential is adopted to describe the interaction between C36 clusters and diamond surface, and the deposition mechanism of multi-C36 clusters on the diamond surface is also studied by using the method of molecular dynamics simulation. The simulation results show that the competition effects of two interactions, i.e. the interaction between cluster and cluster and the interaction between cluster and crystal plane, are studied, and then the influence of these competition effects on C36 cluster deposition is analysed. The finding is that when an incident energy is appropriately chosen, C36 clusters can be chemically adsorbed and deposited steadily on the diamond surface in the form of single-layer, and in the deposition process the multi-C36 clusters present a phenomenon of energy transmission. The experimental result shows that at a temperature of 300K, in order to deposit C36 clusters into a steady nanostructured single-layered film, the optimal incident energy is between 10 and 18 eV, if the incident energy is larger than 18 eV, the C36 clusters will be deposited into an island nano-structured film.

关 键 词:单层碳膜  纳米材料  纳米结构  沉积机制
收稿时间:2008-03-19

Deposition mechanism of nano-structured single-layered C36 film on a diamond (100) crystal plane
Chen Ming-Jun,Liang Ying-Chun,Yuan Yi-Jie and Li Dan. Deposition mechanism of nano-structured single-layered C36 film on a diamond (100) crystal plane[J]. Chinese Physics B, 2008, 17(11): 4260-4267
Authors:Chen Ming-Jun  Liang Ying-Chun  Yuan Yi-Jie  Li Dan
Affiliation:Center for Precision Engineering, Harbin Institute ofTechnology,Harbin 150001, China
Abstract:The Brenner--LJ potential is adopted to describe the interactionbetween CCC$_{36}$ clusters, Brenner--LJpotential, nano-structured single-layered film, competition effectProject supported byNew Century Elitist Supporting Program Foundation by the Ministry ofEducation of Chinapar (Contract No NCET-06-0332) and the NationalNatural Science Foundation of China(Grant No 50405011).6148, 6185, 4630,0630MThe Brenner--LJ potential is adopted to describe the interactionbetween C$_{36}$ clusters and diamond surface, and the depositionmechanism of multi-C$_{36}$ clusters on the diamond surface is alsostudied by using the method of molecular dynamics simulation. Thesimulation results show that the competition effects of twointeractions, i.e. the interaction between cluster and cluster andthe interaction between cluster and crystal plane, are studied, andthen the influence of these competition effects on C$_{36}$ clusterdeposition is analysed. The finding is that when an incident energyis appropriately chosen, C$_{36}$ clusters can be chemicallyadsorbed and deposited steadily on the diamond surface in the formof single-layer, and in the deposition process the multi-C$_{36}$clusters present a phenomenon of energy transmission. Theexperimental result shows that at a temperature of 300K, in order todeposit C$_{36}$ clusters into a steady nano-structuredsingle-layered film, the optimal incident energy is between 10 and18,eV, if the incident energy is larger than 18,eV, the C$_{36}$clusters will be deposited into an island nano-structured film.
Keywords:CC$_{36}$ clusters   Brenner--LJpotential   nano-structured single-layered film   competition effect
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