| 精密气动液压伺服系统用于傅里叶变换光谱仪光谱测量 |
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| 引用本文： | 李志刚,王淑荣,王权陡,李福田.精密气动液压伺服系统用于傅里叶变换光谱仪光谱测量[J].光谱学与光谱分析,2000,20(4):589-591. |
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| 作者姓名： | 李志刚 王淑荣 王权陡 李福田 |
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| 作者单位： | 中国科学院长春光学精密机械研究所,应用光学国家重点实验室,130022,长春 |
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| 摘 要： | 讨论了傅里叶变换光谱仪动镜稳定平移的重要性,研制了以高压无氧氮气为动力源的精密气动液压系统用于推进在研傅里叶变换光谱仪“猫眼”动镜系统,并在此基础之上测量了ＺＹＧＯ干涉仪光源光谱图。
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| 关 键 词： | 傅里叶变换光谱仪 液压系统 光谱图 光谱测量 |
Spectral Measuring of Fourier Transform Spectrometer Using Pneumatic Hydraulic Servo System |
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| Zhigang LI,Shurong WANG,Quandou WANG,Futian LI.Spectral Measuring of Fourier Transform Spectrometer Using Pneumatic Hydraulic Servo System[J].Spectroscopy and Spectral Analysis,2000,20(4):589-591. |
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| Authors: | Zhigang LI Shurong WANG Quandou WANG Futian LI |
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| Institution: | State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Science, 130022 Changchun. |
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| Abstract: | The importance of driving mirror smoothly used in Fourier transform spectrometer (FTS) is discussed. We have designed and used high precision pneumatic hydraulic servo system to move "cat-eyes" optical system in FTS. The light source spectrum of ZYGO interferometer is measured by use of this system. |
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| Keywords: | Fourier transform spectrometer Hydraulic system Spectrogram |
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