溅射Al-C-O/Al太阳选择性吸收涂层

设计计算了以Al为底层的多层Al-C-O的太阳吸收涂层。运用直流磁控溅射制备了这种Al-C-O/Al吸收涂层。理论计算与实验测量的结果基本一致。经真空中烘烤后,涂层的Al-C-O/Al太阳吸收率α≈0.92,室温热发射率ε≈0.04,具有优良的光谱选择性。由于使用单个溅射靶,简化了溅射系统,提高了靶溅射的利用率。关键词：

SPUTTERED ALUMINIUM-CARBON-OXYGEN SOLAR SELECTIVE ABSORBING SURFACES

The calculations about A1-C-O/A1 solar selective absorbing surfaces have been carried out. Reasonable agreement is obtained between computed and experimentally measured reflectances and absorptances for multilayer Al-C-O thin films on aluminium base layer, which are prepared using magnetron sputtering with single aluminium cathode. Solar absorptance of A1-C-O/A1 selective surface is about 0.92 and emittance (room temperature) around 0.04. The sputtering systme is simplified and more efficient for the use of aluminium cathode.