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Visualization and identification of nanoparticles in si subjected to the successive implantation of 64Zn+ and 16O+ ions |
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| Authors: | V V Privezentsev V S Kulikauskas A N Shemuhin A Yu Trifonov E P Kirilenko A A Batrakov |
| Institution: | 1. Institute of Physics and Technology, Russian Academy of Sciences, Moscow, 117218, Russia 2. Skobel’tsyn Institute of Nuclear Physics, Moscow State University, Moscow, 119991, Russia 3. Lukin State Research Institute of Physical Problems, Zelenograd, Moscow oblast, 124460, Russia 4. National Research University of Electronic Technology (MIET), Zelenograd, Moscow oblast, 124498, Russia 5. National Research University “Moscow Power Engineering Institute,”, Moscow, 111250, Russia |
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