Plasma diagnostic on a low-flow plasma for inductively coupled plasma optical emission spectrometry |
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| Authors: | Carsten Engelhard George C-Y Chan Gerardo Gamez Wolfgang Buscher Gary M Hieftje |
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| Institution: | 1. Department of Chemistry, Indiana University, Bloomington, IN 47405, USA;2. University of Münster, Department of Inorganic and Analytical Chemistry, Corrensstr. 30, D-48149 Münster, Germany |
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| Abstract: | In order to elucidate the fundamental properties of a low-flow inductively coupled plasma (ICP) operated under total Ar consumption of 0.6 L min− 1, excitation temperatures, rotational temperatures, ionization temperatures, electron temperatures, and electron number densities were studied with optical emission based methods. The plasma was operated in the SHIP torch (Static High Sensitivity ICP), which was designed for optical emission spectrometric detection. |
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| Keywords: | Inductively coupled plasma SHIP torch Plasma diagnostic Temperatures Electron number density |
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