Affiliation: | 1. School of Physical Science and Technology, ShanghaiTech University, Shanghai, 201210 China;2. National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050 China;3. Center for Transformative Science, ShanghaiTech University, Shanghai, 201210 China National Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050 China;4. School of Physical Science and Technology, ShanghaiTech University, Shanghai, 201210 China Center for Transformative Science, ShanghaiTech University, Shanghai, 201210 China |