Ionized-cluster beam epitaxial growth of GaP films on GaP and Si substrates

Epitaxial films of GaP on GaP and Si substrates are grown by the Ionized-Cluster Beam Technology. The doping of Zn and N during the growth of the film are also discussed. A p-type epitaxial film doped by Zn and N shows an absorption spectrum similar to that of a direct transition type semiconductor. P-n junction LEDs are fabricated by depositing p-type GaP on n-type substrate. The luminescence from the device was observed.