Light harvesting analysis of a nano‐cylinder structure on crystalline silicon using the Mie scattering model |
| |
Authors: | Sheng-Hui Chen Yu-Wen Yeh Shao-Ze Tseng I-Ting Shih Chia-Hua Chan Cheng-Chung Lee |
| |
Institution: | 1. Department of Optics and Photonics, National Central University, 300 Chung-Da Rd., Chung-Li, Taiwan (320);2. Graduate Institute of Energy Engineering, National Central University, 300 Chung-Da Rd., Chung-Li, Taiwan (320) |
| |
Abstract: | In this study, nano spheres of different diameters (d = 200 nm, 300 nm, and 400 nm) were applied in nano-sphere lithography with dry etching to construct nano-cylinder structures on the surface of crystalline silicon wafers. The structure was then bombarded by a Kaufman-type directive ion source to shape and modify the surface topography as pillar-like or cone-like structures. Finally, an AR-coating layer was deposited on the surface of the nano-cylinder structure. When the size of the nano-cylinder structure approached the wavelength of light, Mie scattering analysis was utilized to describe the optical properties formed by the structures. The results showed that the haze parameters could reach 87.8% in the visible region and 91.1% in the infra-red region. |
| |
Keywords: | |
本文献已被 ScienceDirect 等数据库收录! |
|