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InAs/GaAs柱形岛的制备及特性研究
引用本文:朱天伟,徐波,何军,赵凤瑷,张春玲,谢二庆,刘峰奇,王占国.InAs/GaAs柱形岛的制备及特性研究[J].物理学报,2004,53(1):301-305.
作者姓名:朱天伟  徐波  何军  赵凤瑷  张春玲  谢二庆  刘峰奇  王占国
作者单位:(1)兰州大学物理科学与技术学院,兰州 730000; (2)中国科学院半导体研究所半导体材料科学重点实验室,北京 100083; (3)中国科学院半导体研究所半导体材料科学重点实验室,北京 100083;兰州大学物理科学与技术学院,兰州 730000
基金项目:国家重点基础研究发展规划项目(批准号:G2000068303)、国家自然科学基金(批准号:60076024、90101002、90201033)、国家高技术研究发展计划项目(批准号:2002AA311070)和中国科学院知识创新重大项目(批准号:KJCX1-06-06)资助的课题.
摘    要:利用固源分子束外延(MBE)的方法经SK模式自组装生长由多层InAs/GaAs量子点组成的柱形岛.具体分析了GaAs间隔层厚度,生长停顿时间以及InAs淀积量对发光峰波长的影响.原子力显微镜(AFM)结果显示柱形岛表面的形状和尺寸都比较均匀;室温下不同高度的柱形岛样品的发光波长分别达到1.32和1.4μm,而单层量子点的发光波长仅为1.1μm,充分说明了量子点高度对发光波长的决定性影响,这为调节量子点发光波长提供了一种直观且行之有效的方法. 关键词: 柱形岛 生长停顿 间隔层厚度 PL谱

关 键 词:柱形岛  生长停顿  间隔层厚度  PL谱
文章编号:1000-3290/2004/53(01)/0301-05
收稿时间:2003-02-21

The fabrication and properties of InAs/GaAs columnal islands
Zhu Tian-Wei,Xu Bo,He Jun,Zhao Feng-Ai,Zhang Chun-Ling,Xie Er-Qing,Liu Feng-Qi and Wang Zhan-Guo.The fabrication and properties of InAs/GaAs columnal islands[J].Acta Physica Sinica,2004,53(1):301-305.
Authors:Zhu Tian-Wei  Xu Bo  He Jun  Zhao Feng-Ai  Zhang Chun-Ling  Xie Er-Qing  Liu Feng-Qi and Wang Zhan-Guo
Abstract:A columnal islands system, which was composed of three layers of self-assembled InAs/GaAs quantum dots (QDs), has been fabricated by solid-source molecular beam epitaxy (MBE) through S-K mode on a (100) semi-insulating GaAs substrate. The effects of the thickness of GaAs space layer, the growth interruption time and the amount of InAs deposition on the emission wavelength of columnal islands were presented. The image of atomic force microscopy (AFM) indicated the columnal islands with high uniformity in size and shape. At room temperature, the emission wavelength of columnal islands with different effective heights was achieved 1.32 and 1.4μm; however, the emission wavelength of single-layer QDs with normal height was just 1.1μm. It provides a useful and intuitive approach to artificially control the emission wavelength of a QD material system.
Keywords:InAs/GaAs columnal islands  growth interruption  space layer  PL spectra
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