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自组装成膜技术制备TiO2薄膜的XPS研究
引用本文:肖中党,黄丹,顾建华,陆祖宏. 自组装成膜技术制备TiO2薄膜的XPS研究[J]. 物理化学学报, 1998, 14(1): 57-62. DOI: 10.3866/PKU.WHXB19980111
作者姓名:肖中党  黄丹  顾建华  陆祖宏
作者单位:National Laboratory of Molecnlar and Biomolecular Electronics,Southeast University,Nanjing 210096,Chemistry Department of Nantong Teacher College,Nantong 226007
摘    要:
采用自组装成膜技术制备里TiO2薄膜,应用X射线光电子能谱研究自组装膜及其氧化膜和淀积的TiO2薄膜,结果表明,硅烷偶联剂成功地组装在玻璃基片上,足够长时间的氧化对使端基(-SH)完全氧化为磺酸基,淀积在基片上的TiO2膜牢固性好,平均膜厚在10nm.淀积膜中的钛可能有几种不同的氧化态,不同的酸度影响TiO2的淀积效果

关 键 词:XPS  自组装单层膜  TiO2薄膜  
收稿时间:1997-05-12
修稿时间:1997-06-24

X-ray Photoelectron Spectroscopy Study of the Deposition of TiO_2 Thin Films on Self-assembly Monolayer
Xiao Zhongdang, Gu Jianhua, Lu Zuhong. X-ray Photoelectron Spectroscopy Study of the Deposition of TiO_2 Thin Films on Self-assembly Monolayer[J]. Acta Physico-Chimica Sinica, 1998, 14(1): 57-62. DOI: 10.3866/PKU.WHXB19980111
Authors:Xiao Zhongdang   Gu Jianhua   Lu Zuhong
Affiliation:National Laboratory of Molecnlar and Biomolecular Electronics,Southeast University,Nanjing 210096|Chemistry Department of Nantong Teacher College,Nantong 226007
Abstract:
X-ray photoelectron spectroscopy(XPS)was used to study the chemistry and flim morphology during titanium oxide deposition from aqueous solution on functionalized surfaces prepared by oxidizing the end-functional groups self-assembled on glass.Longer treatment of SAMs with hydrogen peroxide in acetic acid resulted in efficient conversion of the terminal group (SH-)to a sulfonate group. The deposition of thin films in TiCl4 solution of varied acidity gave different yields. and ther are different oxidation states of Ti in the TiO2 thin film. The thin film showed excellent adhearence.
Keywords:XPS. Self-assembly monolayers   TiO_2 thin films
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