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Specific Features of Distribution and Relaxation of Elastic Stresses in Homoepitaxial CVD Films of Germanium and Diamond |
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| Authors: | Prokhorov I. A. Voloshin A. E. Romanov D. A. Bolshakov A. P. Ralchenko V. G. |
| Affiliation: | 1.Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,” Russian Academy of Sciences, 119333, Moscow, Russia ;2.Bauman Moscow State Technical University, Kaluga Branch, 248004, Kaluga, Russia ;3.Prokhorov General Physics Institute, Russian Academy of Sciences, 119991, Moscow, Russia ;4.National Research Nuclear University MEPhI, 115409, Moscow, Russia ; |
| Abstract: | Crystallography Reports - The real structures of epitaxial CVD films of germanium and diamond have been comparatively analyzed. The influence of the specific features of elastic-stress distribution... |
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