Interferometric profiling of microcantilevers in liquid

Silicon micro cantilevers are used as highly sensitive transducers for a wide range of physical, chemical and biochemical stimuli. Vibrating the cantilevers at higher-order resonant modes can achieve extra sensitivity, but the difficulty lies in determining exactly which modes are excited in the cantilever. This problem is exacerbated for cantilever sensors operating in liquid where the computational analysis of the resonance modes is very challenging. Using strobed interferometric microscopy, we are able to image the dynamic behavior of individual (100×500×1 μm³) cantilevers in an eight cantilever array over frequencies from 0–1 MHz. We show how some modifications to the interferometric microscope allow for the spatial visualization of 16 longitudinal modes of cantilevers working in liquid with nanometer-scale amplitudes. We also compare the shift in frequency response and reduction in quality factor for cantilevers resonating in liquid versus in air and simulations in vacuum. Because the resonant frequency spectrum is fairly complex and does not follow simple intuition, our work maps the actual behavior of cantilevers without having any specific knowledge of the sample and environment parameters and without the necessity of involved simulations and calculations.