Institution: | 1.Institute of Physics, Kazan State University, Kazan, 420008, Russia ;2.Institute of Applied Research, Academy of Sciences of Tatarstan, Kazan, 420111, Russia ;3.National Research University of Electronic Technology (MIET), Zelenograd, Moscow, 124498, Russia ;4.OOO NT-MDT, Zelenograd, Moscow, 124460, Russia ; |