面阵CCD相机的飞秒激光损伤分析

研究了飞秒激光对CCD相机的干扰和损伤效应。采用波长为800 nm,脉宽为100 fs,单脉冲能量为500μJ的脉冲激光辐照行间转移型面阵CCD相机,测量了飞秒激光对CCD相机的损伤阈值。在逐步提高到达CCD靶面能量的过程中观察点损伤、线损伤和全靶面损伤等实验现象,得到了点损伤阈值为151.2 mJ/cm2,线损伤阈值为508.2 mJ/cm2,全靶面损伤阈值为5.91 J/cm2。测量了CCD在不同损伤情况下时钟信号线间及其与地间的电阻值,通过对比CCD损伤前后的电阻值,发现线损伤和全靶面损伤时CCD垂直转移时钟线间及其与地间的电阻值明显变小。最后分析讨论了损伤部位和损伤机理。

Analysis of femtosecond laser induced damage to array CCD camera

The disturbing and damage effects of a femtosecond laser on the CCD camera were researched. A laser pulse with a wavelength of 800 nm, pulse width of 100 fs and a single pulse energy of 500 μJ was used to radiate an interline CCD solid-state image sensor and the damage threshold was measured in the experiment. The phenomenon of the point damage, line damage and the whole target surface damage were observed while increasing the energy of reaching CCD target surface, and the corresponding damage thresholds were 151.2 mJ/cm², 508.2 mJ/cm² and 5.91 J/cm², respectively. In the different damage situations of the CCD, the resistance values between the clock signal lines, and between the clock signal line and the ground were measured. By contrasting the resistance values of the CCD before and after the damage, it was found that the resistance values between the vertical transfer clock signal lines decreased significantly, and the same results were achieved between the vertical transfer clock signal line and the ground. At last, the damage position and the damage mechanism were discussed.