Institution: | 1. Department of Electrical and Computer Engineering, University of California, Los Angeles, CA, United States;2. California NanoSystems Institute, Los Angeles, CA, United States;3. SiTime, Inc., Santa Clara, CA, United States;4. Department of Mechanical Engineering, Stanford University, Stanford, CA, United States;1. Fraunhofer ENAS, Technologie-Campus 3, Chemnitz, Germany;2. Chemnitzer Werkstoffmechanik GmbH, Technologie-Campus 1, Chemnitz, Germany;1. Tottori University, Tottori, Japan;2. National Institute of Materials Science, Tsukuba, Japan;1. Department of Electronics and Nanoengineering, Aalto University, Espoo, Finland;2. Nanofab, Micronova, Aalto University, Espoo, Finland |