| 放电等离子体极紫外光源中的主脉冲电源 |
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| 引用本文： | 吕鹏, 刘春芳, 张潮海, 等. 放电等离子体极紫外光源中的主脉冲电源[J]. 强激光与粒子束, 2010, 22(02). |
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| 作者姓名： | 吕鹏 刘春芳 张潮海 赵永蓬 王骐 贾兴 |
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| 作者单位： | 1.哈尔滨工业大学 电气工程系, 哈尔滨 1 50001 ;;;2.哈尔滨工业大学 可调谐激光技术国家级重点实验室,哈尔滨 1 50001 ;;;3.中国工程物理研究院 流体物理研究所, 四川 绵阳 621 000 |
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| 摘 要： | 描述了Z箍缩放电等离子体极紫外光源系统中的主脉冲电源，给出了主电路拓扑结构，重点介绍了三级磁脉冲压缩网络，给出了关键参数的设计计算，并且介绍了新颖的末级磁脉冲压缩放电结构。实验结果显示:各级磁脉冲压缩效果达到设计指标，电源输出电压峰达30 kV,输出电流峰值大于40 kA，电流脉冲宽度200 ns，满足Z箍缩放电等离子极紫外光源对主脉冲的要求。
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| 关 键 词： | Z箍缩 放电等离子体 极紫外光源 主脉冲 磁脉冲压缩 |
Experimental study on main pulse power supply for dicharge produced plasma extreme ultraviolet source |
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| liu chunfang, zhang chaohai, zhao yongpeng, et al. Experimental study on main pulse power supply for dicharge produced plasma extreme ultraviolet source[J]. High Power Laser and Particle Beams, 2010, 22. |
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| Authors: | liu chunfang zhang chaohai zhao yongpeng wang qi jia xing |
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| Affiliation: | 1. Electrical Engineering Department,Harbin Institute of Technology,Harbin 150001,China;;;2. National Key Laboratory of Tunable Laser Technology,Harbin Institute of Technology,Harbin 150001,China;;;3. Institute of Fluid Physics,CAEP,Mianyang 621000,China |
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| Abstract: | Extreme ultraviolet lithography(EUVL) is regarded as one of the most promising next generation lithographies. Among all the EUVL system technologies, the extreme ultraviolet source is the key issue. Compared with other light sources, gas discharge-produced plasma extreme ultraviolet source has drawn much attention around the world for its advantages in many aspects.The main pulse power generator for the Z-pinch discharge produced plasma extreme ultraviolet source is decribed in this paper, the circuit topology is presented. The critical 3-stage magnetic pulse compression is emphasized, its parameters are presented in the paper. Moreover, a novel configuration of the final magnetic pulse conpression unit is introduced. Experiment results show that each pulse compression effect meets the ant |
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| Keywords: | z-pinch discharge produced plasma extreme ultraviolet source main pulse magnetic pulse compression |
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