Magnetically actuated bi-directional microactuators with permalloy and Fe/Pt hard magnet |
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| Institution: | 1. Department of Mechanical and Electro-Mechanical Engineering, Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaoshiung 804, Taiwan;2. Mechanical Industry Research Laboratories, Industrial Technology Research Institute, Hsinchu 310, Taiwan;1. Laboratory of Welding and Forging, Beijing Institute of Aeronautical Materials, Beijing 100095, PR China;2. Science and Technology on Scramjet Laboratory, National University of Defense Technology, Hunan, Changsha 410073, PR China;1. CNR-IMM, Via Santa Sofia 64, I-95123 Catania, Italy;2. Department of Physics, University of Catania, Via Santa Sofia 64, I-95123 Catania, Italy;1. Research Center of Composite Materials, Shanghai University, Shanghai 200072, China;2. Key Laboratory of Inorganic Coating Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China;1. Department of Physics, Sungkyunkwan University, Suwon 440-746, Republic of Korea;2. UVSOR Facility, Institute for Molecular Science, Okazaki 444-8585, Japan;3. Department of Advanced Physics, Hirosaki University, Hirosaki 036-8224, Japan;4. School of Physical Sciences, The Graduate University for Advanced Studies, Okazaki 444-8585, Japan;5. Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan;6. Center for Fostering Young and Innovative Researchers, Nagoya Institute of Technology, Nagoya 466-8555, Japan;7. Graduate School of Frontier Biosciences, Osaka University, Suita 565-0871, Japan;8. Department of Emerging Materials Science, Daegu Gyeongbuk Institute of Science and Technology (DGIST), Daegu 711-873, Republic of Korea;9. Synchrotron Radiation Research Center, Japan Atomic Energy Agency, SPring-8, Sayo, Hyogo 679-5148, Japan;10. Japan Synchrotron Radiation Research Institute/SPring-8, Sayo, Hyogo 679-5198, Japan;11. Department of Physics, Kyoto Sangyo University, Kyoto 603-8555, Japan |
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| Abstract: | Bi-directional polyimide (PI) electromagnetic microactuator with different geometries are designed, fabricated and tested. Fabrication of the electromagnetic microactuator consists of 10 μm thick Ni/Fe (80/20) permalloy deposition on the PI diaphragm by electroplating, high aspect ratio electroplating of copper planar coil with 10 μm in thickness, bulk micromachining, and excimer laser selective ablation. They were fabricated by a novel concept avoiding the etching selectivity and residual stress problems during wafer etching. A mathematical model is created by ANSYS software to analyze the microactuator. The external magnetic field intensity (Hext) generated by the planar coil is simulated by ANSYS software. ANSYS software is used to predict the deflection angle of the microactuator. Besides, to provide bi-directional and large deflection angle of microactuator, hard magnet Fe/Pt is deposited at a low temperature of 300 °C by sputtering onto the PI diaphragm to produce a perpendicular magnetic anisotropic field. This magnetic field can enhance the interaction with Hext to induce attractive and repulsive bi-directional force to provide large displacement. The results of magnetic microactuator with and without hard magnets are compared and discussed. The preliminary result reveals that the electromagnetic microactuator with hard magnet shows a greater deflection angle than that without one. |
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