Zone-Plate Interferometer for Measuring the Shape Error of Mirrors with Large Numerical Aperture and Steep Asphericity |
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| Authors: | Takashi Nomura Kazuhide Kamiya Hiroshi Miyashiro Hatsuzo Tashiro Kazuo Yoshikawa |
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| Institution: | (1) Department of Mechanical Systems Engineering, Faculty of Engineering, Toyama Prefectural University, Kosugimachi Toyama 939-03, Japan;(2) Department of Mechanical Systems Engineering, Faculty of Engineering, Toyama University, Gofuku, Toyama 3190, Japan |
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| Abstract: | A compact zone-plate interferometer is developed to measure the shape error of concave mirrors. A diffracted light of (0, 0) and that of (-1, -1) or (+1, +1) are used in the interferometer. The interferometer enables us to measure the shape error of mirrors with a large numerical aperture and a steep asphericity. The shape errors of a spherical mirror and a parabolic mirror are measured by the interferometer, and that of the former agrees well with that measured by Fizeau interferometer. Methods for adjustments of zone plates and the mirrors being tested are proposed to perform precise measurements of the mirror shapes.Presented at the International Commission for Optics Topical Meeting, Kyoto, 1994. |
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| Keywords: | zone-plate interferometer shape measurement of mirror on-machine measurement computer generated hologram large numerical aperture aspherical mirror |
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