Micromachining of a thin film by laser ablation using femtosecond laser with masks |
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| Authors: | Yoshiki Nakata Tatsuo Okada Mitsuo Maeda |
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| Institution: | Graduate School of Information Science and Electrical Engineering, Kyushu University, 6-10-1 Hakozaki, Higashi-Ku, Fukuoka 812-8581, Japan |
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| Abstract: | A gold thin film was machined by laser ablation using a femtosecond laser with mask patterns in the shape of lines and numbers. The patterns were successfully transferred with proper focusing and laser fluence. The optimal femtosecond laser fluence to keep the line width was about 5.2 mJ/cm2 on the mask, and 99 mJ/cm2 on the film. The processing resolution was 13 μm, and the narrowest line width was about 4 μm. |
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| Keywords: | Femtosecond laser Laser ablation Micromachining Mask transfer |
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