Adaptive optics interferometer using superspeckles for high resolution deformation measurement

Digital speckle pattern interferometry (DSPI) is a well-known technique for measuring deformations, but it is limited in range by speckle decorrelation. We developed an adaptive interferometer with increased measurement range by combining the DSPI set-up with a pupil filter that generates optical superresolution. As a result, a decrease in the transverse speckle size is observed accompanied with a substantial increase in the longitudinal speckle size. The increase in the speckle correlation length along the optical axis allows for obtaining an out-of-plane deformation measurement over a significantly extended depth. An experimental verification of this concept of superspeckles is presented with an intensity-only LCD spatial light modulator (SLM) acting as a pupil filter. Comparison of speckle correlation fringes with and without the superresolution filter confirms the proposed concept. The present work demonstrates a doubling of the measurement range when using the superresolution interferometer. A standard set-up in which the speckle length is comparably elongated by stopping down the lens has a similar loss of intensity, but its lateral resolution is only half as good.