| 纳米分辨率的三维形貌检测仪 |
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| 引用本文： | 王桂英,陈侦,步杨,徐至展,王之江. 纳米分辨率的三维形貌检测仪[J]. 分析测试技术与仪器, 1998, 4(4): 193-197 |
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| 作者姓名： | 王桂英 陈侦 步杨 徐至展 王之江 |
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| 作者单位： | 中国科学院上海光机所 |
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| 基金项目： | 国家自然科学基金,中国科学院大型仪器开发基金 |
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| 摘 要： | 从光干涉方式，瞳窗关系和光源带宽等基本关系出发，利用空间不变系统理论解析了相移显微干涉检测系统中衍射效应的影响。为了减小横向分辨率对纵向分辨率的影响，利用相关信息提取或数字滤波的方法，获得了纳米分辨率的三维形貌。
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| 关 键 词： | 纳米分辨率 三维成像 显微成像 三维形貌检测仪 |
| 收稿时间： | 1998-08-13 |
| 修稿时间： | 1998-09-29 |
Tree Dimension Profile Testing with Nanometer Resolution |
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| Wang Guiying,Chen Zhen,Bu Yang,Xu Zhizhan and Wang Zhijiang. Tree Dimension Profile Testing with Nanometer Resolution[J]. Analysis and Testing Technology and Instruments, 1998, 4(4): 193-197 |
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| Authors: | Wang Guiying Chen Zhen Bu Yang Xu Zhizhan Wang Zhijiang |
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| Affiliation: | Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences Shanghai 201800;Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences Shanghai 201800;Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences Shanghai 201800;Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences Shanghai 201800;Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences Shanghai 201800 |
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| Abstract: | The diffraction effect on transversal and vertical resolution was analyzed by a simulation computation for spatial invariant system. Interference way, relation of resolution with clear apertures of the system, and light source bandwidth were considered. To reduce the effect of transversal resolution on vertical resolution, a correlation information extraction, in other words, a numeral filtering method has been suggested and the surface profile of three dimension with nanomerter has also been obtained. |
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| Keywords: | nanometer resolution therr dimensional image formation correlation information extraction |
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