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Film-thickness Error Analysis of Optical Disk Systems
作者姓名:WANG Yang  GU Donghong  GAN Fuxi
作者单位:Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China
基金项目:theNationalNaturalScienceFoundationofChina (Grant .No .5 9832 0 6 0 )
摘    要:1 Introduction  Recentlyopticaldisksabletostorealargequantityofinformationhavebeenusedascompactdisk (CD ) ,digitalversatiledisk(DVD) ,andtheirrecordableorrewritabletypes(suchasCD R ,CD RW ,DVD R ,andDVD RAM ) 1 ] .Anopticaldiskisakindofmultilayersystemdepositedona…

收稿时间:2000/6/28

Film-thickness Error Analysis of Optical Disk Systems
WANG Yang,GU Donghong,GAN Fuxi.Film-thickness Error Analysis of Optical Disk Systems[J].中国激光(英文版),2001,10(3):206-210.
Authors:WANG Yang  GU Donghong  GAN Fuxi
Abstract:It is difficult to exactly control the film thickness of optical disk multilayer in the actual coating process. The thickness error becomes a main factor affecting the optical characters of the film system. The thickness error′s sensitivity factor of dielectric optical multilayer is derived from the optical matrix in this paper. The effect of the thickness error on the reflectivity or reflectivity contrast of the optical disk multilayer is analyzed with a numerical calculation. The sensitivities to thickness error for different layers or in different film-thickness ranges are compared and discussed. A sketchy method defining allowable thickness error is given. Some experimental results verify the applicability of our theoretical analysis.
Keywords:optical disk  multilayer  film  thickness error factor  numerical calculation
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