Marangoni effect induced micro/nano-patterning on Sb2Te3 phase change thin film by laser pulse

Thermocapillary and chemicapillary effects are known to coexist in a material molten pool when irradiated by a pulse laser. According to the effects, we fabricate various patterns with different shapes on a Sb₂Te₃ phase change thin film by precisely adjusting the pulse energy. In this process, the laser power is fixed at 5.0 mW, and the pulse width is adjusted from 100 ns to 5 ns. The shape of the patterns gradually changes from a dimple-bowl shape, a dome shape, a “Sombrero” shape to a deep-bowl shape following an increase in the pulse energy, which corresponds to the crystallization-threshold, bump-threshold, rupture-threshold, and ablation-threshold of the material. The different patterns are the results of the competition between the thermocapillary and chemicapillary effects in the molten pool, which determine the nature of the flow and lead to the different patterns in different laser parameters.