用于集成光学陀螺的波导谐振腔设计

给出了一种集成光学陀螺谐振腔的优化设计方案,在保证集成光学陀螺精度的同时更利于微型化。选用传输损耗为0.01dB/cm的硅基二氧化硅材料作基底,谐振腔内损耗仅为0.5dB,保证了谐振腔的高清晰度;采用准单模矩形波导结构,利用弯曲波导对一阶模的有效限制实现了光的基模传输,利于谐振腔的小型化;分析了波导的传输损耗、波导耦合器分光比对谐振腔性能及陀螺极限灵敏度的影响,得出波导耦合器分光比的优化参数,并仿真得到谐振腔的谐振清晰度达到70以上。在激光器线宽为30kHz,探测器响应度0.95A/W,积分时间为10s的条件下,系统的极限灵敏度为1.6°/h。

Optimal design of integrated optic waveguide resonator for IORG

An optimized resonator is proposed to ensure remaining the IFOG(integrated optical gyroscope) characteristics of high temperature stability,low-cost,and miniaturization.The resonator loss is less than 0.5dB by using the SiO2 on silicon substrate whose transmission loss is 0.01dB/cm.The finesse of the resonator is ensured.The structure of quasi-single mode waveguide can transmit fundamental mode and first-order mode.Curve waveguide filter first-order mode so that only the fundamental mode transmitted in the resonator.Analysis is made to the influence of waveguide's transmission lose and coupler's coupling ratio on the resonator finesse and IOG fundamental detection limit.The resonator finesse is above 70 after optimized design of coupler.And the fundamental detection limit is about 1.6°/h on condition that laser linewidth is 30kHz,detector responsibility is 0.95A/W and integral time is 10s.