|
|||||
|
|
| TiN和Ti1-xSixNy薄膜的微观结构分析 | |
| 引用本文： | 张晨辉,雒建斌,李文治,陈大融. TiN和Ti1-xSixNy薄膜的微观结构分析[J]. 物理学报, 2004, 53(1): 182-188 |
| 作者姓名： | 张晨辉 雒建斌 李文治 陈大融 |
| 作者单位： | 清华大学摩擦学国家重点实验室,北京 100084 |
| 基金项目： | 国家自然科学基金(批准号：90206022)和杰出青年基金(批准号：50025515)资助的课题. |
| 摘 要： | 使用x射线衍射(XRD)、x射线光电子谱(XPS)、高分辨透射电子显微镜(HRTEM)和原子力显微镜（AFM）多种观测手段分析了TiN薄膜和Ti1-xSixNy纳米复合薄膜的微观结构.实验分析证明Ti1-xSixNy薄膜是由直径为3—5nm的纳米晶TiN和非晶Si3N4相构成，并且Ti1-xSix关键词：纳米复合薄膜自由能表面粗糙度TiN1-xSixNy')" href="#">Ti1-xSixNy |
| 关 键 词： | 纳米复合薄膜 自由能 表面粗糙度 TiN Ti1-xSixNy |
| 文章编号： | 1000-3290/2004/53(01)/0182-07 |
| 收稿时间： | 2003-03-14 |
The study on the microstructure of TiN and Ti1-xSixNy coatings |
|
| Zhang Chen-Hui,Luo Jian-Bin,Li Wen-Zhi and Chen Da-Rong. The study on the microstructure of TiN and Ti1-xSixNy coatings[J]. Acta Physica Sinica, 2004, 53(1): 182-188 | |
| Authors: | Zhang Chen-Hui Luo Jian-Bin Li Wen-Zhi Chen Da-Rong |
| Abstract: | The microstructure of TiN coatings and Ti1-xSixNy nanocomposite coatings was studied by means of x-ray diffrection, x-ray photoelection spectroscopy, high resolution transmission electron microscopy and atomic force microscopy. The results showed that the Ti1-xSixNy coatings consisted of TiN nanocrystallites with grain size of 3-5nm and amorphous Si3N4 phase. The roughness of Ti1-xSixNy coatings was less than that of TiN coatings prepared under the same conditions. The orientation of TiN crystals in the Ti1-xSixNy coatings was discussed on the basis of interface energy. |
| Keywords: | nanocomposite coating free energy roughness TiN Ti1-xSixNy |
| 本文献已被 CNKI 维普 等数据库收录！ | |
| 点击此处可从《物理学报》浏览原始摘要信息 | |
| 点击此处可从《物理学报》下载免费的PDF全文 | |