高精度非回转对称非球面加工方法研究

本文提出一种高精度非回转对称非球面加工方法。首先,通过范成法铣磨出非回转对称非球面的最佳拟合球;然后,利用古典抛光修正小磨头确定抛光难以修正的中频误差;最后,利用高精度气囊抛光设备(IRP)精确对位精修面形,在不引入额外中频误差条件下,通过高精度对位检测技术实现非回转对称非球面高精度加工。将该方法应用于定点曲率半径为970.737 mm、k=-1、口径为106 mm三次非球面加工,降低了加工难度,提高了加工精度,面形误差收敛到1/30λ(RMS)。实验结果验证了本文加工方法的正确性和可行性,对高精度非回转对称非球面加工具有一定的指导意义。

Research on manufacturing method of non-rotationally symmetrical aspheric surface with high accuracy

A novel manufacturing method of non-rotationally symmetrical aspheric surface with high accuracy is proposed in this paper. First, a optimum fit sphere of non-rotationally symmetrical asphere is ground through generating cutting, which is then polished through triditional polishing method in order to remove mid-spatial-frequency errors that cannot be realized through sub-aperture polishing tool. Finally, bonnet polishing method(IRP) is used for corrective polishing without generating extra mid-spatial-frequency errors in condition of high-accuracy positioning measurement technology. This method is employed in the manufacuring of a third-order aspheric surface with parameters of ROC=970.737 mm, k=-1 and D=106 mm. After several polishing iterations, the figure accuracy can be converged to 1/30λ(RMS). The correctness and feasibility of the manufacturing method are proved. This method would be meaningful in manufacturing non-rotationally symmetrical aspheric surface with small deviation in the future.