Mn掺杂对ZnO薄膜结构及发光性能的影响

利用脉冲激光沉积的方法在Si衬底上生长出了c轴高度取向的Mn掺杂ZnO薄膜.X射线衍射表明所有样品都具有纤锌矿结构,没有发现其它相,随着掺杂量的增加,c轴晶格常数增大.原子力显微镜结果显示:Mn的掺杂引起了ZnO薄膜表面粗糙度的变化.由光致发光谱发现,在387 nm附近出现了由于近带边自由激子复合引起的紫外峰,还有以4...

Structural and Photoluminescence Analysis of Mn-doped ZnO thin Films

Zn_1-xMn_xO thin films were successfully grown on Si (111) substrates by pulsed laser deposition (PLD). X-ray diffraction measurement revealed that all the films were single phase and had wurtzite structure with c-axis orientation. As Mn concentration increased in Zn_1-xMn_xO films, the c-axis lattice constant increased gradually. Atomic Force Microscopy (AFM) showed that surface roughness and morphology changed with doping concentrations. Photoluminescence spectra of Zn_1-xMn_xO thin films were also studied which shows a narrow UV band at 387 nm, a broad blue band of 430 nm and another broad peak at 545 nm. It was deduced that Mn doping leads to a blue shift of the UV band, and a red shift of 430 nm and 545 nm.