|
|||||
|
|
Laser microfabrication of thin films: Part one |
|
| Authors: | F. Micheli I. W. Boyd |
| Affiliation: | a The authors are in the Department of Electronic and Electrical Engineering, University College London, Torrington Place, London WC1E 7JE, UK |
| Abstract: | In this paper, the first of a series of three reviewing the subject of laser microchemical processing — a potentially powerful technique for the fabrication of a variety of micro and opto-electronics devices — a general introduction to the principle of operation is given and some mainly thermal aspects of film growth are described, for example laser annealing, oxidation, nitridation and evaporation. |
| Keywords: | lasers laser processing thin films opto-electronic devices |
| 本文献已被 ScienceDirect 等数据库收录！ | |