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Choosing the ranges for measuring the reflectivity of a prism coupler in the waveguide spectroscopy of thin films |
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| Authors: | A B Sotsky L M Steingart S O Parashkov L I Sotskaya |
| Abstract: | A criterion for selecting the best ranges for measuring the reflectivity of a prism coupler, based on minimizing the error in reconstructing the parameters of thin films using the least-square method, is proposed. The effectiveness of the criterion is demonstrated by solving the inverse optical problem for a SiOx film deposited on a silicon substrate as an example. |
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