Calculating the probability of pore formation by multicharged ions incident on an ultrathin film |
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Authors: | G M Filippov V A Aleksandrov |
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Abstract: | The problem of pore formation during the propagation of Xe+q ions with energies of around 50 keV and charges q = 20–54 through an ultrathin carbon film is discussed. The results from calculations suggest that pore formation can be attributed to the perforation of part of a bombarded film by the moving wave packet of a xenon ion with a sufficiently high charge. |
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