| 应力盘智能控制盘面面形的表征方法及检测技术的研究 |
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| 引用本文： | 范斌,杨力,曾志革,李晓今,邓建明,万勇建.应力盘智能控制盘面面形的表征方法及检测技术的研究[J].光学技术,2005,31(5):751-753. |
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| 作者姓名： | 范斌 杨力 曾志革 李晓今 邓建明 万勇建 |
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| 作者单位： | 中国科学院光电技术研究所,成都,610209;中国科学院光电技术研究所,成都,610209;中国科学院光电技术研究所,成都,610209;中国科学院光电技术研究所,成都,610209;中国科学院光电技术研究所,成都,610209;中国科学院光电技术研究所,成都,610209 |
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| 基金项目： | 国家863高技术资助项目 |
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| 摘 要： | 分析了CMAC神经网络应力盘智能控制中面形表征及检测的特点,提出了以Zernike多项式系数用于表征应力盘盘面面形的方法,以微位移阵列传感器检测得到的原始数据经插值拟合重构出盘面面型数据,再经Gram-Schimdt正交化后拟合出的Zernike多项式的系数,以此作为CMAC神经网络的输入样本来完成CMAC神经网络的训练。并在实验中初步验证了此方法的可行性。
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| 关 键 词： | 光学加工 应力盘 CMAC |
| 文章编号： | 1002-1582(2005)05-0751-03 |
| 修稿时间： | 2004年8月6日 |
Method for representing the surface and testing technology of stressed-lap in CMAC controller |
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| FAN Bin,YANG Li,ZENG Zhi-ge,LI Xiao-jin,DENG Jian-ming,WAN Yong-jian.Method for representing the surface and testing technology of stressed-lap in CMAC controller[J].Optical Technique,2005,31(5):751-753. |
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| Authors: | FAN Bin YANG Li ZENG Zhi-ge LI Xiao-jin DENG Jian-ming WAN Yong-jian |
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| Abstract: | A method for representing the surface and testing technology of stressed-lap was provided base on the analysis of stressed-lap surface feature in CMAC neural networks. The original data from the micro displacement sensor matrix were interpolated and fitted to reform the surface data of stressed-lap. The coefficient of Zernike polynomial fitted form reformed data by Gram-Schimdt method was looked as input sample to finish training the CMAC neural networks. The experiment showed that this method is available to represent and tested the surface of stressed-lap. |
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| Keywords: | optic manufacture stressed-lap CMAC neural networks |
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