| Sheath Structure of an Electronegative Plasma |
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| 作者姓名： | 正正汹 刘金远 邹秀 刘悦 王晓钢 |
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| 作者单位： | StateKeyLaboratoryofMaterialsModificationbyLaser,ElectronandIonBeams,DalianUniversityofTechnology,Dalian116024 |
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| 摘 要： | We investigate the sheath structure of an electronegative plasma at steady state with the assumptions of cold positive ions and hot negative ions. The modified Bohm criterion is obtained with the Sagdeev potential by introducing a modified ion sound velocity. At the same time the electric potential, net space charge and particles densities in the sheath are analysed in several cases of different temperature ratios of electrons to negative ions and different density ratios of negative ions to positive ions.
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| 关 键 词： | 电负性等离子体 鞘状结构 稳态 冷正离子 热负离子 改进Bohm标准 密度 |
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