云纹干涉法面内位移测量的光栅补偿方法研究

运用光的干涉与衍射理论，导出了对称入射光路云纹干涉法面内位移计量的基本公式。针对云纹干涉法在实际应用中易引入刚体位移对真实面内位移干扰这一棘手问题，设计了定量补偿面内位移和变形的非对称光栅补偿光路系统。由于采用高灵敏度基准光栅调节的方法，比螺旋测微器等纯机械方法具有众多优越性。本文分析了该补偿方法对面内正应变条纹梯度和面内剪应变条纹梯度的补偿原理和具体实施过程。本方法大大提高了云纹干涉法面内位移计量和补偿的可靠性。

The study of grating gompensation method on the in-plane displacement measuring of moire interferometry

By using the theory of optical interferometry and diffraction,the basic formulas of sym-metrical lighing system in moire interferometry in-plane displacement measuring are given. By consider-ing the fact that the rigid body displacement may lead to errors in the actual problem of measuring the in-plane displacement,an unsymmetrical lighing system are designed in which the measured in-plane dis-placement and strain are compensated quantitatively. As the method of high accurate grating adjustment is used,this method has many advantages to the pure mechanical one. In the paper,the compensative theory and concret implementation method for the fringe gradient of normal and shear strains are ana-lyzed.These methods could highly increase the reliability of in-plane displacement and strain measure-ment and compensation of moire interferometry.